Planar Technology for NDT-Ge X-Ray Microcalorimeters: Absorber Fabrication
Abstract
We have investigated the electroplating process to deposit thick uniform films of tin on a Ge wafer coated with Spin-On Glass, in order to fabricate the absorbers for Ge microcalorimeter arrays. Here we discuss some technological details and propose two alternative metal bilayer to be used as seed for the electroplating.
- Publication:
-
The Thirteenth International Workshop on Low Temperature Detectors - LTD13
- Pub Date:
- December 2009
- DOI:
- 10.1063/1.3292295
- Bibcode:
- 2009AIPC.1185..112L
- Keywords:
-
- calorimetry;
- superconducting cables;
- ion implantation;
- 07.20.Fw;
- 84.71.Fk;
- 61.72.uf;
- Calorimeters;
- Superconducting cables;
- Ge and Si