Sensors have sandwich structure metal/porous silicon/crystalline silicon/Al. The contact metal on porous silicon was from Au and from Pd. Porosity of the samples is 57% and 63%. Low frequency noises before, during and after influence of hydrogen gas flow are studied. Noise spectra of the samples in general have 1/fγ forms with 0.7⩽γ⩽1.
Noise and Fluctuations: 20th International Conference on Noise and Fluctuations (ICNF-2009)
- Pub Date:
- April 2009
- Surface double layers Schottky barriers and work functions;
- Electrochemical sensors;
- Semiconductor devices