Improving the electrical performance of a conductive atomic force microscope with a logarithmic current-to-voltage converter

A new configuration of conductive atomic force microscope (CAFM) is presented, which is based in a standard CAFM where the typical I-V converter has been replaced by a logI-V amplifier. This substitution extends the current dynamic range from 1-100pAto1pA -1mA. With the broadening of the current dynamic range, the CAFM can access new applications, such as the reliability evaluation of metal-oxide-semiconductor gate dielectrics. As an example, the setup has been tested by analyzing breakdown spots induced in SiO₂ layers.