Sputtering limits versus signal-to-noise limits in the observation of Sn balls in a Ga[sup +] microscope
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- November 2008
- DOI:
- 10.1116/1.3013306
- Bibcode:
- 2008JVSTB..26.2107C