Shintake monitor is a nanometer-scale electron beam size monitor. It probes a electron beam by an interference fringe pattern formed by split laser beams. Minimum measurable beam size by this method is less than 1/10 of laser wavelength. In ATF2, Shintake monitor will be used for the IP beam size monitor to measure 37 nm (design) beam size. Development status of the Shintake monitor, including fringe phase monitoring and stabilization, gamma detector and collimators, is described. In addition, we discuss the beam size measurement by Shintake monitor in ILC.