Isotropic etching of silicon in fluorine gas for MEMS micromachining Arana, Leonel R. ; Mas, Nuria De ; Schmidt, Raymond ; Franz, Aleksander J. ; Schmidt, Martin A. ; Jensen, Klavs F. Abstract Publication: Journal of Micromechanics and Microengineering Pub Date: February 2007 DOI: 10.1088/0960-1317/17/2/026 Bibcode: 2007JMiMi..17..384A