Transmission measurement at 10.6 μm of Te2As3Se5 rib waveguides on As2S3 substrate
Abstract
The feasibility of chalcogenide rib waveguides working at λ =10.6μm has been demonstrated. The waveguides comprised a several micron thick Te2As3Se5 film deposited by thermal evaporation on a polished As2S3 glass substrate and further etched by physical etching in Ar or CF4/O2 atmosphere. Output images at 10.6μm and some propagation losses roughly estimated at 10dB /cm proved that the obtained structures behaved as channel waveguides with a good lateral confinement of the light. The work opens the doors to the realization of components able to work in the mid- and thermal infrared up to 20μm and even more.
- Publication:
-
Applied Physics Letters
- Pub Date:
- January 2007
- DOI:
- arXiv:
- arXiv:0705.0499
- Bibcode:
- 2007ApPhL..90a1110V
- Keywords:
-
- tellurium compounds;
- chalcogenide glasses;
- rib waveguides;
- optical waveguides;
- integrated optics;
- semiconductor thin films;
- vacuum deposition;
- polishing;
- etching;
- optical losses;
- 42.82.Et;
- 42.79.Gn;
- Waveguides couplers and arrays;
- Optical waveguides and couplers;
- Physics - Optics
- E-Print:
- The following article appeared in Vigreux-Bercovici et al., Appl. Phys. Lett. 90, 011110 (2007) and may be found at http://link.aip.org/link/?apl/90/011110