Direct wiring of carbon nanotubes for integration in nanoelectromechanical systems
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- 2006
- DOI:
- 10.1116/1.2388965
- Bibcode:
- 2006JVSTB..24.3144B