Oxidation of silicon nanowires Shir, D. ; Liu, B. Z. ; Mohammad, A. M. ; Lew, K. K. ; Mohney, S. E. Abstract Publication: Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures Pub Date: 2006 DOI: 10.1116/1.2198847 Bibcode: 2006JVSTB..24.1333S