Optically driven micropump produced by three-dimensional two-photon microfabrication
Abstract
An optically driven lobed micropump was developed using three-dimensional two-photon microfabrication. The two built-in rotors, 9μm in diameter, are cooperatively driven by means of time-divided scanning of a single laser beam. It was demonstrated that a tracer particle was moved by simultaneously rotating the two rotors. The velocity of the tracer particle was proportional to the rotation speed of the rotors in the range of 0.2-0.7μm/s. The flow rate was estimated to be sub-pL/min level. This ultralow flow rate will be useful for further integration and miniaturization of micro-total-analysis systems.
- Publication:
-
Applied Physics Letters
- Pub Date:
- October 2006
- DOI:
- Bibcode:
- 2006ApPhL..89n4101M
- Keywords:
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- 47.61.Fg;
- 47.85.Np;
- 85.85.+j;
- 42.62.-b;
- 47.60.+i;
- 07.10.Cm;
- Flows in micro-electromechanical systems and nano-electromechanical systems;
- Fluidics;
- Micro- and nano-electromechanical systems and devices;
- Laser applications;
- Flows in ducts channels nozzles and conduits;
- Micromechanical devices and systems