Application of zero-temperature-gradient zero-bias thermally stimulated current spectroscopy to ultrathin high-dielectric-constant insulator film characterization
Abstract
Previously, we have reported our application of the zero-bias thermally stimulated current (ZBTSC) spectroscopy technique to study defect states in high-dielectric-constant insulator films such as tantalum oxide with much less parasitic current which can be a serious limitation for the conventional thermally stimulated current method. However, a parasitic current can still be observed for ZBTSC because of a small parasitic temperature gradient across the sample. The thermal design of the ZBTSC system can be improved, resulting in zero-temperature-gradient ZBTSC which can be used to detect deeper traps than those by ZBTSC.
- Publication:
-
Applied Physics Letters
- Pub Date:
- April 2006
- DOI:
- 10.1063/1.2199590
- Bibcode:
- 2006ApPhL..88q2906L
- Keywords:
-
- 77.84.Bw;
- 77.55.+f;
- 72.20.Jv;
- Elements oxides nitrides borides carbides chalcogenides etc.;
- Dielectric thin films;
- Charge carriers: generation recombination lifetime and trapping