Quartz crystal microbalance study of tungsten atomic layer deposition using WF and SiH Fabreguette, F. ; Sechrist, Z. ; Elam, J. ; George, S. Abstract Publication: Thin Solid Films Pub Date: September 2005 DOI: 10.1016/j.tsf.2005.04.114 Bibcode: 2005TSF...488..103F