Preparation and characterization of TiO 2 thin films using vacuum ultraviolet light in a sol-gel process

In the current work, we prepared TiO ₂ thin films using vacuum ultraviolet (VUV) irradiation of several different intensities before firing. We then investigated effects of VUV intensity and alkoxide mixtures on the microstructural evolution of the films. The microstructure of the film without VUV treatment comprises uniform anatase grains. Grains in films with VUV irradiation gradually form a domain-like microstructure with increasing VUV intensity. The heterogeneous hydrolysis rate in the mixed alkoxide will trigger formation of the domain-like microstructure.