Mass Distribution in Laser-Produced Plasma during Ablation of Complex Targets

Co₆₇Cr₇Fe₄Si₈B₁₄ magnetic alloy and Cd₂₅Mn₂₅Te₅₀ semimagnetic semiconductor targets were ablated in vacuum with a XeCl excimer laser at different fluences. The ejected material was collected onto unheated silicon substrates at different angles with respect to the target normal. Compositional investigations were performed on the deposited films. In addition, during semiconductor semimagnetic film depositions, a combination of wavelength, temporal and spatial resolved optical emission spectroscopic measurements was carried out on the laser-induced plasma. Experimental results related to Co-based magnetic depositions reveal that the concentration of lighter elements is larger in films deposited at higher collecting angle. This effect is more evident at lower laser fluences. Compositional variations with collecting angle in the studied multielemental films are attributed to the scattering effects among the ablated chemical species in the plume. Similarly, different distribution of chemical species due to different masses is observed during semimagnetic semiconductor target ablation.