Damascene Cu electrodeposition on metal organic chemical vapor deposition-grown Ru thin film barrier
Abstract
Not Available
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- 2004
- DOI:
- 10.1116/1.1819911
- Bibcode:
- 2004JVSTB..22.2649C