Improved fifth-order geometric aberration coefficients of electron lenses
Abstract
In this paper, fifth-order geometric aberrations of round electron lenses have been restudied. Improved analytical formulae of the aberration coefficients were derived by the computer algebra software—Mathematica—and their correctness verified by cross-checking with numerical integration and differential algebraic techniques for a given electromagnetic lens.
- Publication:
-
Journal of Physics D Applied Physics
- Pub Date:
- March 2004
- DOI:
- 10.1088/0022-3727/37/5/002
- Bibcode:
- 2004JPhD...37..653L