A comparison of surface sensitive reflection spectroscopies
Abstract
The surface sensitivity (in the sub-nanometre regime) of reflection spectroscopies is discussed. Simulations are used to illustrate the strengths and limitations of 45 degree reflectometry (45DR). Particular emphasis is placed upon the comparison with spectroscopic ellipsometry.
- Publication:
-
Journal of Physics Condensed Matter
- Pub Date:
- October 2004
- DOI:
- 10.1088/0953-8984/16/39/003
- Bibcode:
- 2004JPCM...16S4279R