Magnetic property of Sm2Fe17N3 films grown by RF magnetron sputtering
Abstract
Sm2Fe17Nx film magnets were prepared using an Sm2Fe17 target in an N2 gas atmosphere using an RF magnetron sputtering technique. The effect of nitrogenation treatment such as N2 gas pressure during sputtering, film heating temperature, N2 gas rate, and the effect of film thickness on the microstructure and magnetic properties of Sm2Fe17Nx films were studied.
- Publication:
-
Journal of Magnetism and Magnetic Materials
- Pub Date:
- May 2004
- DOI:
- 10.1016/j.jmmm.2003.12.1265
- Bibcode:
- 2004JMMM..272E.889K
- Keywords:
-
- Sm2Fe17N3;
- In-plane anisotropy;
- RF magnetron;
- Sm<SUB>2</SUB>Fe<SUB>17</SUB>N<SUB>3</SUB>
