Damage profiles of ultrashallow B implants in Si and the Kinchin-Peace relationship van den Berg, J. A. ; Carter, G. ; Armour, D. G. ; Werner, M. ; Goldberg, R. D. ; Collart, E. J. H. ; Bailey, P. ; Noakes, T. C. Q. Abstract Publication: Applied Physics Letters Pub Date: October 2004 Bibcode: 2004ApPhL..85.3074V