Atomic force microscopy measurements of crystal nucleation and growth rates in thin films of amorphous Te alloys
Abstract
Ex situ atomic force microscopy in combination with a high-precision furnace has been employed for a systematic study of crystallization kinetics of sputtered amorphous Ag0.055In0.065Sb0.59Te0.29, Ge4Sb1Te5, and Ge2Sb2Te5 thin films used for optical data storage. Direct observation of crystals enabled us to establish the temperature dependence of the crystal nucleation rate and crystal growth velocity around 150°C. While these alloys exhibited similar crystal growth characteristics, the crystal nucleation behavior of Ag0.055In0.065Sb0.59Te0.29 differed significantly from that of Ge4Sb1Te5 and Ge2Sb2Te5. These observations provide an explanation for the different recrystallization mechanisms observed upon laser heating of amorphous marks.
- Publication:
-
Applied Physics Letters
- Pub Date:
- June 2004
- DOI:
- 10.1063/1.1764591
- Bibcode:
- 2004ApPhL..84.5240K
- Keywords:
-
- 61.43.Dq;
- 81.15.Cd;
- 68.37.Ps;
- 68.55.Ac;
- 64.70.Kb;
- 82.60.Nh;
- 42.62.-b;
- Amorphous semiconductors metals and alloys;
- Deposition by sputtering;
- Atomic force microscopy;
- Nucleation and growth: microscopic aspects;
- Solid-solid transitions;
- Thermodynamics of nucleation;
- Laser applications