Experimental Comparison of Extreme-Ultraviolet Multilayers for Solar Physics
Abstract
We compare the reflectance and stability of multilayers comprising either Si/Mo, Si/Mo2C, Si/B4C, Si/C, or Si/SiC bilayers, designed for use as extreme-ultraviolet (EUV) reflective coatings. The films were deposited by using magnetron sputtering and characterized by both x-ray and EUV reflectometry. We find that the new Si/SiC multilayer offers the greatest spectral selectivity at the longer wavelengths, as well as the greatest thermal stability. We also describe the optimization of multilayers designed for the Solar-B EIS instrument. Finally, we compare experimental reflectance data with calculations and conclude that currently available optical constants cannot be used to adequately model the performance of many of these multilayers.
- Publication:
-
Applied Optics
- Pub Date:
- March 2004
- DOI:
- 10.1364/AO.43.001835
- Bibcode:
- 2004ApOpt..43.1835W
- Keywords:
-
- optical multilayers;
- coatings;
- X-ray optics;
- solar radiation;
- astronomical instruments;
- reflectivity;
- optical constants;
- thin films;
- optical properties;
- astronomical techniques;
- optics