Measurement of the influence of dispersion on white-light interferometry
Abstract
White-light interferometry is a well-established method for measuring the height profiles of samples with rough as well as with smooth surfaces. Because white-light interferometry uses broadband light sources, the problem of dispersion arises. Because the optical paths in the two interferometer arms cannot be balanced for all wavelengths, the white-light correlogram is distorted, which interferes with its evaluation. We investigate the influence of setup parameters on the shape of the correlogram. Calculated values are compared with experimental results.
- Publication:
-
Applied Optics
- Pub Date:
- February 2004
- DOI:
- Bibcode:
- 2004ApOpt..43..766P
- Keywords:
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- light interferometry;
- surface topography measurement;
- optical dispersion;
- image resolution;
- infrared spectra;
- CCD image sensors