Recent investigations have revealed the profound influence of adhesion, friction, and wear on the reliability of micro/nanoelectromechanical systems (MEMS/NEMS) devices. Studies of determination and suppression of these failure mechanisms are critical to improving the reliability of MEMS/NEMS. Using atomic force microscopy (AFM), researchers have developed the methodology to study the micro/nanotribological and mechanical behavior of one of the commercial MEMS digital micromirror devices (DMD). Surface roughness, adhesion, friction, and wear properties of the contacting elements of the DMD lubricated by a self-assembled monolayer (SAM) have been extensively studied. Potential mechanism for micromirror stiction accrual has been suggested in light of the findings. In addition, the molecular level adhesion, friction, and wear performance of SAMs have been also investigated using AFM. The molecular tribological mechanisms of SAMs have been discussed to aid the design and selection of proper lubricants for MEMS/NEMS.