Laser terahertz-emission microscope for inspecting electrical faults in integrated circuits Kiwa, Toshihiko ; Tonouchi, Masayoshi ; Yamashita, Masatsugu ; Kawase, Kodo Abstract Publication: Optics Letters Pub Date: November 2003 DOI: 10.1364/OL.28.002058 Bibcode: 2003OptL...28.2058K