Nanoaccuracy Position Control of a Pneumatic Cylinder Driven Table

The development of ultraprecision positioning technology is urgently required with the incessant demand for higher accuracy in high technology manufacturing. In this study, therefore, a linear pneumatic-driven ultraprecision table is built; and, a velocity compensator is designed to overcome the stick-slip effect of the pneumatic table. The velocity compensation signal is directly added to the conventional PD and Fuzzy controller to control the table, respectively. This method is effective not only to overcome the stick-slip phenomenon of the cylinder but also to improve the positioning accuracy of the pneumatic servo system. The experimental results have shown that the table has the positioning accuracy of 20nm.