Thin Films: Stress Measurement Techniques
Abstract
Thin films are in widespread use in a variety of applications, e.g., for interconnections in semiconductor devices, as optical coatings, and as protective layers on high temperature alloys. The stresses in these films often play an important role in the functioning and reliability of the products. Methods are needed for the measurement of these stresses.
- Publication:
-
Encyclopedia of Materials: Science and Technology
- Pub Date:
- 2001
- DOI:
- 10.1016/B0-08-043152-6/01671-5
- Bibcode:
- 2001emst.book.9274F