Shedding light on the growth of amorphous, polymorphous, protocrystalline and microcrystalline silicon thin films
Abstract
- Publication:
-
Thin Solid Films
- Pub Date:
- February 2001
- DOI:
- 10.1016/S0040-6090(00)01596-0
- Bibcode:
- 2001TSF...383..161F