High-efficiency tunable X-ray focusing optics using mirrors and laterally-graded multilayers
Abstract
A high-efficiency X-ray microfocusing device covering a 7-30 keV energy range has been developed and tested at the ESRF BM5 beamline. It is composed of a mirror mounted on a 2-moments flexural hinge based bender and coated with 2 laterally-graded multilayers and a single-layer of iridium. With a demagnification factor of 128, focal spot sizes down to 1 μm were obtained using an on-line shaping procedure having a sub-μrad precision.
- Publication:
-
Nuclear Instruments and Methods in Physics Research A
- Pub Date:
- July 2001
- DOI:
- 10.1016/S0168-9002(01)00533-2
- Bibcode:
- 2001NIMPA.467..954Z
