Langasite for high-temperature bulk acoustic wave applications
Abstract
Langasite (La3Ga5SiO14) and related compounds are promising candidates for high-temperature piezoelectric applications. To determine the stable operation of langasite as a high-temperature bulk acoustic wave (BAW) resonator, we characterized electrical conductivity [σel=1.56×exp(-1.07 eV/kT)S/cm] and oxygen diffusivity [DoxT=5×10-5 exp(-1.45 eV/kT)cm2/s] up to elevated temperatures. Langasite was successfully operated up to 900 °C as a BAW resonator with an average mass sensitivity of about 0.17 μg Hz-1 cm-2. This enables, in principle, high-temperature monitoring of deposition rates and thermogravimetry with high sensitivity.
- Publication:
-
Applied Physics Letters
- Pub Date:
- February 2001
- DOI:
- 10.1063/1.1345797
- Bibcode:
- 2001ApPhL..78..976F
- Keywords:
-
- 77.65.Fs;
- 85.50.-n;
- Electromechanical resonance;
- quartz resonators;
- Dielectric ferroelectric and piezoelectric devices