Room-Temperature Ammonia Sensor Based on CuxS Film
Abstract
Gas sensing properties, surface chemical composition and morphology of CuxS-based films deposited on polyethylene and porous Si substrates were investigated. It was determined that the CuxS films show a reversible increase of resistance due to the exposure to ammonia gas at room temperature. The analysed samples were not sensitive to H2 and CO.
- Publication:
-
Sensors and Microsystems
- Pub Date:
- December 2000
- DOI:
- Bibcode:
- 2000semi.conf..170C