Experimental determination of scanning probe microscope cantilever spring constants utilizing a nanoindentation apparatus

A rapid, nondestructive, and accurate method for determining the normal spring constants of scanning probe microscopy cantilevers is presented. Spring constants are determined using a commercial combination atomic force microscope and nanoindentation apparatus configured with a W-indenter tip geometrically configured into either a scanning tunneling microscope pointed tip or chisel shape that may be placed onto the cantilever of interest with high accuracy. A load is applied to the cantilever tip and the corresponding displacement is measured. From the force-displacement curve, the spring constant is determined. For cantilevers with spring constants greater than 1 N/m, the derived spring constants are believed to be accurate to within ±10%, with better accuracy for stiffer levers. This method has been used to measure the stiffness of cantilevers from several manufacturers.