All-metal sealing elements for high-vacuum components
Abstract
Development of high-vacuum technology in many areas of science and engineering requires vacuum equipment to be simpler in service and to take less expense for manufacture. A sealing element of a new design for high-vacuum equipment and brief results of tests of specimens of vacuum valves are presented in this article. A vacuum valve consists of a sealing unit in the form of a cassette and of a drive mechanism located in the atmosphere. Its advantages are lower expenses of manufacturing, low requirements of precision of manufacturing, and possible restoration of the sealing plate.
- Publication:
-
Nuclear Instruments and Methods in Physics Research A
- Pub Date:
- June 2000
- DOI:
- 10.1016/S0168-9002(00)00210-2
- Bibcode:
- 2000NIMPA.448..129G