Ultrashallow P(+) /N Junction Formation by Plasma Ion Implantation S. K., Baek ; C. J., Choi ; T. Y., Seong ; H., Hwang ; D. W., Moon ; H. K., Kim Abstract Publication: Journal of Korean Physical Society Pub Date: December 2000 DOI: 10.3938/jkps.37.912 Bibcode: 2000JKPS...37..912S