Ultrashallow p+ - n junctions in Si(111): electron-beam diagnostics of the surface region Bagraev, N. T. ; Klyachkin, L. E. ; Malyarenko, A. M. ; Andronov, A. A. ; Robozerov, S. V. Abstract Publication: Semiconductors Pub Date: January 1999 DOI: 10.1134/1.1187647 Bibcode: 1999Semic..33...51B