Investigating the process latitude of a low temperature metalorganic chemical vapor deposition TiNitride process
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- March 1999
- DOI:
- 10.1116/1.590570
- Bibcode:
- 1999JVSTB..17..410B