Proximity x-ray lithography of siloxane and polymer films containing benzyl chloride functional groups Dressick, W. J. ; Dulcey, C. S. ; Brandow, S. L. ; Witschi, H. ; Neeley, P. F. Abstract Publication: Journal of Vacuum Science Technology Pub Date: July 1999 Bibcode: 1999JVST...17.1432D