We report progress on the development of a two-dimensional array of microshutters which can serve as a high efficiency, high contrast field selection device for a multi-object grating spectrometer. The device is a close-packed array of shutters, with a typical size of 100 μm square and area filling factor of up to 80%. Each of the shutters is individually selectable. Since the device works in transmission, there is no loss of contrast due to diffraction from the edges of unactivated pixels. The devices can also be used as a micromirror array. Each shutter, made of single crystal Si with an appropriate optical coating, pivots on a torsion flexure along one edge. We will present the actuation mechanism, and describe the electronic multiplexer required for pixel selection. The present generation of devices is being prototyped using a focused ion beam milling apparatus. Future work will center on developing a photolithographic design for a large format device which would be suitable for scientific demonstration.
American Astronomical Society Meeting Abstracts #193
- Pub Date:
- January 1999