New transparent conducting ZnO-In2O3-SnO2 thin films prepared by magnetron sputtering Minami, T. ; Kakumu, T. ; Shimokawa, K. ; Takata, S. Abstract Publication: Thin Solid Films Pub Date: April 1998 DOI: 10.1016/S0040-6090(97)00547-6 Bibcode: 1998TSF...317..318M