Current status of single ion implantation Shinada, Takahiro ; Kumura, Yoshinori ; Okabe, Jun ; Matsukawa, Takashi ; Ohdomari, Iwao Abstract Publication: Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures Pub Date: July 1998 DOI: 10.1116/1.590196 Bibcode: 1998JVSTB..16.2489S