Erratum: "Comparison of the submicron particle analysis capabilities of Auger electron spectroscopy, time-of-flight secondary ion mass spectrometry, and scanning electron microscopy with energy dispersive x-ray spectroscopy for particles deposited on silicon wafers with one micron thick oxide layers" [J. Vac. Sci. Technol. A 16, 1825 (1998)]
Abstract
- Publication:
-
Journal of Vacuum Science Technology
- Pub Date:
- September 1998
- Bibcode:
- 1998JVST...16.3148D