In situ conductivity characterization of oxide thin film growth phenomena on microhotplates Dimeo, F., Jr. ; Cavicchi, R. E. ; Semancik, S. ; Suehle, J. S. ; Tea, N. H. ; Small, J. ; Armstrong, J. T. ; Kelliher, J. T. Abstract Publication: Journal of Vacuum Science Technology Pub Date: January 1998 Bibcode: 1998JVST...16..131D