The nonlinear and hysteretic behavior of piezo actuators used in scanning probe techniques limits the accuracy of the quantitative interpretation of the measurements. In this paper we present the design of a novel ultra-high vacuum (UHV) compatible scanning tunneling microscope (STM) that is equipped with a newly developed capacitive translation sensor. The sensor has been configured to measure translations in the lateral as well as in the perpendicular direction with sub-Ångstrom resolution. In combination with a model-based digital feedback system, accurate probe positioning and control will be possible, making this instrument suitable for metrological purposes, nanolithography and atomic manipulation.
Applied Physics A: Materials Science & Processing
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