Ellipsometry as a characterization technique
Abstract
A brief historical background of ellipsometry is given, followed by a detailed assessment of its current status and future development. Spectroscopic ellipsometry in the near UV-VIS is now a well-established characterization technique, and its extension to the IR range is quickly reaching a mature state. Other important developments in both theory and instrumentation in the last decade are leading to better and faster in situ, real-time and imaging ellipsometry. Selected works from recent literature are presented to illustrate not only new development trends in the field but also other well-known applications of ellipsometry as a characterization technique.
- Publication:
-
Materials Characterization and Optical Probes Techniques
- Pub Date:
- July 1997
- Bibcode:
- 1997SPIE.CR69..398T