Preparation of thin films by filtered arc deposition and ion assisted arc deposition
Abstract
The present work focuses on Filtered Arc Deposition (FAD) and Ion Assisted Arc Deposition (IAAD) techniques. The properties of TiN, a-diamond and a-C:N films prepared by FAD and IAAD have been investigated in respect to surface morphologies, field emission behavior and optical properties.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- May 1997
- DOI:
- 10.1016/S0168-583X(97)00013-X
- Bibcode:
- 1997NIMPB.127..817Z