Atomic force microscopy of high velocity cluster impact induced nanostructures
Abstract
Beams of high-velocity clusters can be used for micromachining by reactive accelerated cluster erosion (RACE). Atomic force microscopy of isolated impact-induced structures on Si or Pyrex glass reveals nanometer scale elevations instead of craters, pointing at transient localized melting of the target material.
- Publication:
-
Nuclear Instruments and Methods in Physics Research B
- Pub Date:
- February 1997
- DOI:
- 10.1016/S0168-583X(96)00656-8
- Bibcode:
- 1997NIMPB.122..322V