Low Energy Electron Transport in CHF_3
Abstract
Electron transport measurements were made in CHF3 and CHF3 -Argon mixtures, using a pulsed Townsend type drift tube. Drift velocities were measured as a function of E/N in pure CHF3 and mixtures ranging from 0.1 to 2 percent CHF3 in Argon. The E/N range of 0.04 to 50 Td corresponds to average electron energies less than 10 eV. A two term Boltzmann transport code was used to unfolded a set of low energy electron scattering cross sections for CHF_3. The dominate cross sections considered are the total momentum transfer and vibrational excitation. In addition electron attachment was observed. The attachment coefficient was measured to rise toward low electron energy. Comparison of experimental and calculated transport parameters will be presented.
- Publication:
-
APS Annual Gaseous Electronics Meeting Abstracts
- Pub Date:
- October 1997
- Bibcode:
- 1997APS..GECDMP430C