This paper describes the design, fabrication and testing of an electrodynamical microactuator for moving an optical fiber. This device with two degrees of freedom has a motion range of 200 micrometers . It is used for the alignment of optical fibers in the sub-micrometer range. The positioning of a monomode optical fiber with respect to one or several other optical fibers or an optical chip is possible. As a result of the electrodynamic principle the motion is free of slide and friction. The technologies of wet chemical etching of silicon and galvanic batch-processes are used. The magnetic field is generated by a permanent magnet. Around the magnet surface copper coils are built for the deflection of the magnet in two dimensions.
Micromachined Devices and Components II
- Pub Date:
- September 1996