Kirkpatrick-Baez optics for a sub-μm synchrotron X-ray microbeam and its applications to X-ray analysis
A synchrotron X-ray microprobe system based on Kirkpatrick-Baez optics has been developed using X-rays from a multipole wiggler at the Photon Factory to achieve a beam size of less than 1 μm with a sufficient photon flux. Either a double-crystal or a synthetic multilayer monochromator was used for the monochromatization of incident X-rays. The characteristics of the X-ray microprobe were experimentally examined. Though the beam size could be changed from 2 μm to sub-μm, the minimum beam size obtained was about 0.7 × 0.9 μm 2 with a photon flux of 2 × 10 8ph/ s/300 mA for 9 keV X-rays by a multilayer monochromator. The capabilities of the X-ray microbeam system have been demonstrated for X-ray fluorescence trace element analysis. The sensitivity was three orders of magnitude higher compared to a similar type of X-ray microbeam system previously developed for X-rays from a bending magnet. An X-ray micro-diffraction experiment has also been performed for the characterization of local layer defects observed in surface stabilized ferroelectric liquid crystals.