Design of an all-thin-film array of bolometers

Recent advances in thin-film thermometers and membranes allow the development of all-thin-film high-sensitivity thermal detectors. We present here three developments, using a sequential sputtering method and patterning: first, a single interdigited sensor, second, a matrix of five identical discrete sensors, and third, a micro-bolometer. We describe the film deposition process and we evaluate the theoretical performance of the devices.