Latent image formation: Nanoscale topography and calorimetric measurements in chemically amplified resists
Abstract
- Publication:
-
Journal of Vacuum Science Technology B: Microelectronics and Nanometer Structures
- Pub Date:
- November 1996
- DOI:
- 10.1116/1.588626
- Bibcode:
- 1996JVSTB..14.3974O